Predictive modeling of thermoelastic energy dissipation in tunable MEMS mirrors

Houwen W. Tang; Yun-Bo Yi; Mohammad A. Matin

doi:10.1117/1.2909274

1 April 2008 Predictive modeling of thermoelastic energy dissipation in tunable MEMS mirrors

Houwen W. Tang, Yun-Bo Yi, Mohammad A. Matin

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 2, 023004 (April 2008). https://doi.org/10.1117/1.2909274

Abstract

The design of microstructures with a high quality factor (Qvalue) is of significant importance in many microelectromechanical system(MEMS) applications. Thermoelastic damping can cause an intrinsicenergy loss that affects the Q value of high-frequency resonance inthose devices such as MEMS mirrors. We deal with the simulation andanalysis of thermoelastic damping of MEMS mirrors based on the finiteelement method. Four designs of MEMS mirrors with different geometricshapes are studied. In each model, the dynamic responses of the systemsubjected to thermoelastic damping are compared to those of theundamped modes. Then we present a systematic parametric study onboth the resonant frequency and the Q value as functions of variousrepresentative parameters. These results are useful for early predictionof thermoelastic energy loss, not only restricted to the MEMS mirrors butalso applicable in more general MEMS resonators and filters design.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Houwen W. Tang, Yun-Bo Yi, and Mohammad A. Matin "Predictive modeling of thermoelastic energy dissipation in tunable MEMS mirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 023004 (1 April 2008). https://doi.org/10.1117/1.2909274

Published: 1 April 2008

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