MoSi etch of phase-shift masks

Banqui Wu; David Y. Chan

doi:10.1117/1.1530570

1 January 2003 MoSi etch of phase-shift masks

Banqui Wu, David Y. Chan

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, Issue 1, (January 2003). https://doi.org/10.1117/1.1530570

Abstract

Studies on MoSi etch processes were carried out using a design-of-experiments (DOE) methodology. Data was gathered using profilometers and optical critical dimension (CD) measurement systems. MoSi etch chemical kinetics was studied and a kinetic equation was developed showing that MoSi etch rate has a linear relationship with inductively coupled plasma (ICP) power, and an exponential relationship with the negative inverse of the DC bias electrode voltage. The reaction orders of the MoSi etch were 0.2 to SF₆ concentration (molar fraction) and 0.5 to O₂ concentration, and the activation energy was found to be 1350 kJ/mol. A dimensionless number method was used for results analysis and a calculable dimensionless number was defined. This number was found to be proportional to the isolated/dense etch bias. Etcher performance was also analyzed using a matrix transformation method and it was found that matrix-analysis-calculated etch results agreed with those obtained by experimental measurement. The optimal MoSi etch process window was expressed graphically.

©(2003) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Banqui Wu and David Y. Chan "MoSi etch of phase-shift masks," Journal of Micro/Nanolithography, MEMS, and MOEMS 2(1), (1 January 2003). https://doi.org/10.1117/1.1530570

Published: 1 January 2003

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available