High-stroke, high-order MEMS deformable mirrors

Bautista R. Fernandez; Mohamed A. Bouchti; Joel Kubby

doi:10.1117/1.JMM.12.3.033012

12 August 2013 High-stroke, high-order MEMS deformable mirrors

Bautista R. Fernandez, Mohamed A. Bouchti, Joel Kubby

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 3, 033012 (August 2013). https://doi.org/10.1117/1.JMM.12.3.033012

Abstract

Monolithic fabrication of continuous facesheet high-aspect ratio gold microelectromechanical systems (MEMS) deformable mirrors (DMs) onto a thermally matched ceramic–glass substrate (WMS-15) has been performed. The monolithic process allows thick layer deposition (tens of microns) of sacrificial and structural materials thus allowing high-stroke actuation to be achieved. The fabrication process does not require wafer bonding to achieve high aspect ratio three-dimensional structures. A gold continuous facesheet mirror with 3.4 nm surface roughness has been deposited on a 16×16 array of X-beam actuators on a 1-mm pitch. A stroke of 6.4 μm was obtained when poking two neighboring actuators. Initial electrostatic actuation displacement results for a high-aspect ratio gold MEMS DM with a continuous facesheet will be discussed.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Bautista R. Fernandez, Mohamed A. Bouchti, and Joel Kubby "High-stroke, high-order MEMS deformable mirrors," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(3), 033012 (12 August 2013). https://doi.org/10.1117/1.JMM.12.3.033012

Published: 12 August 2013

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KEYWORDS

Actuators

Microelectromechanical systems

Deformable mirrors

Mirrors

Gold

Copper

Semiconducting wafers

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CHORUS Article. This article was made freely available starting 12 August 2014

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