Particle number density gradient samples for nanoparticle metrology with atomic force microscopy

Malcolm A. Lawn; Jan Herrmann; Asa K. Jämting; Renee V. Goreham

doi:10.1117/1.JMM.11.1.011007

29 February 2012 Particle number density gradient samples for nanoparticle metrology with atomic force microscopy

Malcolm A. Lawn, Jan Herrmann, Asa K. Jämting, Renee V. Goreham

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 011007 (February 2012). https://doi.org/10.1117/1.JMM.11.1.011007

Abstract

Nanoparticle metrology with atomic force microscope (AFM) aims to determine an average particle size from measurements of individual nanoparticles derived by image analysis. This constrains the statistical relevance of the measurement due to the limited number of particles which can be practically imaged and analyzed. Consequently, the number density of particles on samples prepared for particle measurement is an important parameter of sample preparation. A number density that is too low makes it difficult to obtain sufficient measurement statistics, whereas a number density that is too high can result in particle agglomeration on the substrate and limit the area of uncovered substrate that is required to obtain a reliable reference for measuring the particle height. We present imaging and measurement results of a particle number density gradient of 16 nm gold nanoparticles deposited using a gradual immersion process. Results demonstrate how samples with particle number density gradients can facilitate identification of an area on a sample with optimal particle number density for AFM particle metrology and thereby improve measurement efficiency and reliability.

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Malcolm A. Lawn, Jan Herrmann, Asa K. Jämting, and Renee V. Goreham "Particle number density gradient samples for nanoparticle metrology with atomic force microscopy," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 011007 (29 February 2012). https://doi.org/10.1117/1.JMM.11.1.011007

Published: 29 February 2012

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KEYWORDS

Particles

Nanoparticles

Atomic force microscopy

Metrology

Gold

Image analysis

Image processing

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