Scaling of high average power, short-pulse CO2 lasers

Akira Endo

doi:10.1117/1.JMM.11.2.021113

20 June 2012 Scaling of high average power, short-pulse CO₂ lasers

Akira Endo

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 2, 021113 (June 2012). https://doi.org/10.1117/1.JMM.11.2.021113

Abstract

The scaling rule of high average power, short-pulse CO2 lasers is described based on the physical fundamentals. Specifications are required for lasers applied to high-volume manufacturing extreme-ultraviolet light sources, simultaneously on the average power over 10 kW, the beam quality less than 2 for M², and the pulse width in the 10 ns range. The amplifier is operated by a cascade amplifier arrangement, and the ruling principle is approximately described by the Frantz-Nodvik equation, with effective small-signal gain g₀ and saturation fluence E_s depending on the amplifier medium and amplified pulse width. Thermal distortion is caused in the optical components, leading to beam propagation instability. The general rule of g₀L<3, where L is the optical gain length, is the requirement to isolate each amplifier by optical shutters. Multiline amplification is efficient to increase the extraction efficiency in the case of less-efficient rotational relaxation. It is concluded that a well-designed single-beam, short-pulse CO₂ laser is operable at 20 kW average output power based on available components, by satisfying all requirements.

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Akira Endo "Scaling of high average power, short-pulse CO₂ lasers," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 021113 (20 June 2012). https://doi.org/10.1117/1.JMM.11.2.021113

Published: 20 June 2012

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KEYWORDS

Gas lasers

Carbon monoxide

Optical amplifiers

Pulsed laser operation

Extreme ultraviolet

Laser applications

Oscillators

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