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Atomic Xenon Data
Book: Photon Sources for Lithography and Metrology
Editor(s): Vivek Bakshi
Author(s): John Gillaspy
Published: 2023
https://doi.org/10.1117/3.2638242.ap1
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Abstract
This section contains chapter 3 from EUV Sources for Lithography, V. Bakshi, Editor, SPIE Press Vol. PM149 (2006).
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CHAPTER 1
 66 PAGES
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KEYWORDS
Xenon
Ionization
Plasma
Ground state
Ions
Data modeling
Extreme ultraviolet lithography
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