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Lithographic Electrochemistry
Book: Chemistry and Lithography, Second Edition, Vol. 2: Chemistry in Lithography
Author(s): Uzodinma Okoroanyanwu
Published: 2023
https://doi.org/10.1117/3.2642420.ch11
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Abstract
Some lithographic operations and processes are based on electrochemical phenomena. Two notable examples include (1) corrosion of metallic chrome (Cr) and molybdenum silicon (MoSi) absorber structures in optical masks and (2) electrochemical imprint lithography. Both phenomena are based on electrochemical anodic oxidation. We explore in this chapter the electrochemical basis of these two phenomena.
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CHAPTER 11
 15 PAGES
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KEYWORDS
Chromium
Reticles
Corrosion
Lithography
Photomasks
Oxides
Metals
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