Improving Augmented Reality: Ion Beam Processing of Slanted Surface Relief Gratings (SRG)

Manuela Lötsch; Matthias Nestler; Marcel Demmler

doi:10.1117/12.3025251

18 June 2024 Improving Augmented Reality: Ion Beam Processing of Slanted Surface Relief Gratings (SRG)

Manuela Lötsch, Matthias Nestler, Marcel Demmler

Proceedings Volume PC13021, Optical Fabrication and Testing VIII; PC1302105 (2024) https://doi.org/10.1117/12.3025251
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Optical patterns, especially surface relief gratings (SRG), are becoming ever-important, with applications ranging from laser mirrors to mixed and augmented reality (MR/AR) devices. In particular, slanted surface relief gratings are essential as in- and out-couplers of light into the waveguide to produce lightweight near-eye AR displays. They allow to suppress higher diffraction orders, maximize light yield, and achieve a wide field of view. The pattern can either be etched directly into the waveguide by reactive ion beam etching (RIBE) or be produced through nano-imprint lithography (NIL). NIL requires the production of a master stamp with defined grating properties. Reactive ion beam trimming (RIBT) is a suitable technology for producing master stamps as it allows manufacturing gratings with varying trench depths and slant angles over a substrate. In addition, it is shown how the shape of the slanted grating can be improved by applying different process parameters.

Conference Presentation

Citation Download Citation

Manuela Lötsch, Matthias Nestler, and Marcel Demmler "Improving Augmented Reality: Ion Beam Processing of Slanted Surface Relief Gratings (SRG)", Proc. SPIE PC13021, Optical Fabrication and Testing VIII, PC1302105 (18 June 2024); https://doi.org/10.1117/12.3025251

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