Dynamic MEMS-integrated optical metasurfaces

Sergey I. Bozhevolnyi

doi:10.1117/12.3021782

11 June 2024 Dynamic MEMS-integrated optical metasurfaces

Sergey I. Bozhevolnyi

Proceedings Volume PC12990, Metamaterials XIV; PC129901J (2024) https://doi.org/10.1117/12.3021782
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Possibilities opened when integrating mirrors of piezoelectric micro-electro-mechanical systems (MEMS) and OMSs in the MEMS-OMS configuration with the mirror-OMS separation being electrically controlled are discussed. Recent experimental demonstrations of electrically controlled beam focusing and full-range phase retarders are presented. The latest developments and functionalities demonstrated will also be presented at the conference.

Conference Presentation

Citation Download Citation

Sergey I. Bozhevolnyi "Dynamic MEMS-integrated optical metasurfaces", Proc. SPIE PC12990, Metamaterials XIV, PC129901J (11 June 2024); https://doi.org/10.1117/12.3021782

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available