Presentation
11 June 2024 Low-cost and scalable manufacturing of optical metasurfaces in the visible using engineered optical materials
Author Affiliations +
Abstract
Here, we demonstrate low-cost, scalable manufacturing of optical metasurfaces with three approaches: 1) increasing a refractive index of resin with dielectric particle embedding for single-step nanoimprinting, 2) suppressing optical losses of hydrogenated amorphous silicon (a-Si:H) to apply complementary-metal-oxide-semiconductor technologies, and 3) high-index Atomic Layer Deposited (ALD) structural resin. We demonstrate the effectiveness of these materials in creating optical metasurfaces operating at different wavelengths in the infrared, visible, and ultraviolet spectra. Our approaches using PER, low-loss a-Si:H, and hybrid ALD structural resin enables the low-cost, large-area manufacturing of efficient optical metasurfaces across different wavelengths, facilitating the commercialization of metasurface-based photonic devices.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Junsuk Rho "Low-cost and scalable manufacturing of optical metasurfaces in the visible using engineered optical materials", Proc. SPIE PC12990, Metamaterials XIV, PC129901C (11 June 2024); https://doi.org/10.1117/12.3014260
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KEYWORDS
Manufacturing

Optics manufacturing

Optical engineering

Atomic layer deposition

Dielectrics

Printing

Holography

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