Adaptive optics allows for spatial control over the phase and intensity of a laser beam, making it a powerful tool to assist ultrashort pulse laser machining. Optical aberrations caused by refraction at interfaces distort the laser focus, compromising resolution and fabrication efficiency. We show how the aberrations can be dynamically compensated using adaptive optics, such as liquid crystal spatial light modulators, for improved manufacturing of functional devices. Examples include fabrication of waveguide circuits in a range of materials, fiber based Bragg sensors for harsh environments, diamond based electronics and compact tunable liquid crystal devices.
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