In the context of searching of new oxide materials for the application in the field of photonics sensors, this work is focused on the fabrication and characterization of tellurite thin films doped with erbium. For the deposition of amorphous TeO2-ZnO-(Bi2O3 or BaO or Na2O)-Er2O3 thin films with thickness around 700 nm, radio-frequency magnetron sputtering technique with Ar:O2 flow ratio = 40:10 sccm was exploited. The deposited films were characterized in detail via X-ray diffraction, atomic force microscopy, profilometry, transmission spectroscopy, variable angle spectroscopic ellipsometry, scanning eectron microscopy with energy-dispersive X-ray analysis and luminescence spectroscopy. The results are discussed in relation with the chemical composition of the fabricated thin films.
The financial support from the European Union’s Horizon Europe Framework Programme under grant agreement No 101092723 is greatly acknowledged.
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