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We demonstrate nano-structuring and the reduction of mid-spatial-frequency (MSF) errors using femtosecond laser figuring and finishing. We established a method to create periodic nanostructures using femtosecond-laser-based ablation. In addition, a laser-created sinusoidal pattern with five cycles/mm was generated to mimic the mid-spatial frequency error that often occurs s during conventional optics fabrication. A deterministic material removal having nanometer-scale precision was performed to remove the mid-spatial-frequency error from 17 nm to one nanometer in magnitude. The resulting surface remains single-digit-nanometer surface roughness after the MSF error correction.
Jie Qiao andGong Chen
"Optical figuring and shape correction using femtosecond lasers", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC1287205 (13 March 2024); https://doi.org/10.1117/12.3004940
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Jie Qiao, Gong Chen, "Optical figuring and shape correction using femtosecond lasers," Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC1287205 (13 March 2024); https://doi.org/10.1117/12.3004940