Atomic layer deposition: a novel coating process for laser applications

Morten Steinecke

doi:10.1117/12.2689691

24 November 2023 Atomic layer deposition: a novel coating process for laser applications

Morten Steinecke

Proceedings Volume PC12726, Laser-Induced Damage in Optical Materials 2023; PC1272609 (2023) https://doi.org/10.1117/12.2689691
Event: SPIE Laser Damage, 2023, Dublin/Livermore, California, United States

Abstract

Atomic layer deposition offers unique advantages compared to more classical PVD coating processes. These advantages include an inherently high coating thickness homogeneity and conformal coating of both micro-optical structures, such as gratings, and large free-form optics, such as aspheric lenses. The talk will introduce the coating process, compare its properties to those of more classical PVD processes and give an overview of recent developments of ALD coatings in optical applications.

Conference Presentation

Citation Download Citation

Morten Steinecke "Atomic layer deposition: a novel coating process for laser applications", Proc. SPIE PC12726, Laser-Induced Damage in Optical Materials 2023, PC1272609 (24 November 2023); https://doi.org/10.1117/12.2689691

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