Advanced material fabrication in 3D with DUV light

Atsushi Taguchi

doi:10.1117/12.2680907

5 October 2023 Advanced material fabrication in 3D with DUV light

Atsushi Taguchi

Proceedings Volume PC12652, UV and Higher Energy Photonics: From Materials to Applications 2023; PC1265205 (2023) https://doi.org/10.1117/12.2680907
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

Light-matter interactions in the deep ultraviolet (DUV) wavelength region exhibits a variety of optical effects such as luminescence, photoisomerization, and polymerization in many materials. Here, we present the use of two-photon excitation (TPE) using a visible wavelength laser to realize the photo-polymerization of molecules at an excitation energy equivalent to DUV light. The DUV excitation initiates direct photo-polymerization of DUV-absorbing moieties without any addition of photo-activating agents such as photo-initiators and sensitizers. Together with 3D fabrication capabilities associated with TPE, our technique allows 3D fabrication of a wider variety of materials including organic and inorganic materials such as ZrO2 and TiO2[1]. A series of fine 3D structures were created with the smallest resolved line-space features of 80 nm. The initiator-free direct laser writing of 3D nanostructures offers a distinct tool for creating nanodevices including optoelectronics, bio-compatible devices, 3D metamaterials, and more. [1] A. Taguchi, et al, “Mutiphoton-excited DUV photolithography for 3D nanofabrication,” ACS Applied Nano Materials 3(11): 11434-11441 (2020).

Conference Presentation

Citation Download Citation

Atsushi Taguchi "Advanced material fabrication in 3D with DUV light", Proc. SPIE PC12652, UV and Higher Energy Photonics: From Materials to Applications 2023, PC1265205 (5 October 2023); https://doi.org/10.1117/12.2680907

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