Optimization of microlens arrays for photon detectors

Frédéric Zanella; Christian Schneider; Luka Ciric; Guillaume Basset

doi:10.1117/12.2666068

9 June 2023 Optimization of microlens arrays for photon detectors

Frédéric Zanella, Christian Schneider, Luka Ciric, Guillaume Basset

Proceedings Volume PC12570, Quantum Optics and Photon Counting 2023; PC1257005 (2023) https://doi.org/10.1117/12.2666068
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

Microlenses, and especially microlens arrays (MLA), are commonly used as stand-alone optical components, for beam homogenization and shaping. Or integrated as wafer-level optics (WLO), either on top of light sources for beam shaping (e.g., on micro-LED or vertical-cavity surface-emitting laser – VCSEL), or on top of light or image sensors as light concentrators. In the latter case, each microlens of the MLA, also known in the photography domain as On-Chip Lens (OCL), redirects the light to the active volume of the pixel located underneath. This increases the external quantum efficiency (EQE) by increasing the pixel effective fill-factor, especially for front-illuminated image sensors and their limited fill-factors. We report various MLA optimizations and the concentration factors achieved when addressing challenges encountered with advanced photon detectors such as single-photon avalanche diodes (SPAD) or silicon photon multiplier (SiPM). For example: substrate size and type (wafer, bare or packaged die), optical transmission range from NUV to NIR, microlens geometrical parameter space (diameters from micrometers to millimeters) and stability to temperature, vibrations and irradiation (UV, gamma and proton).

Conference Presentation

Citation Download Citation

Frédéric Zanella, Christian Schneider, Luka Ciric, and Guillaume Basset "Optimization of microlens arrays for photon detectors", Proc. SPIE PC12570, Quantum Optics and Photon Counting 2023, PC1257005 (9 June 2023); https://doi.org/10.1117/12.2666068

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