Design, fabrication, and characterization of large metalenses

Jeremy Goodsell; Augustine Urbas; Joel Leger; Jannick P. Rolland

doi:10.1117/12.2649327

17 March 2023 Design, fabrication, and characterization of large metalenses

Jeremy Goodsell, Augustine Urbas, Joel Leger, Jannick P. Rolland

Proceedings Volume PC12432, High Contrast Metastructures XII; PC124320I (2023) https://doi.org/10.1117/12.2649327
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

This work demonstrates the utility of a design, fabrication, and testing loop on 10 mm diameter metalenses to accelerate large-scale production of flat optics. By enabling rapid measurement and analysis of metalenses, it is possible to identify differences between designed performance and as-built performance quickly and correlate those to process characteristics. This accelerated feedback between the design, fabrication, and testing is expected to enable higher yields of better-performing metalenses.

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Jeremy Goodsell, Augustine Urbas, Joel Leger, and Jannick P. Rolland "Design, fabrication, and characterization of large metalenses", Proc. SPIE PC12432, High Contrast Metastructures XII, PC124320I (17 March 2023); https://doi.org/10.1117/12.2649327

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KEYWORDS

Modulation transfer functions

Lenses

Metrology

Optical components

Optical fabrication

Optical fabrication equipment

Optics manufacturing

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