Planar- and roll-based transfer printing for scalable heterogeneous integration

Martin D. Dawson; Michael J. Strain; Benoit Guilhabert; Dimitars Jevtics; Alexander A. Lagatsky

doi:10.1117/12.2646170

17 March 2023 Planar- and roll-based transfer printing for scalable heterogeneous integration

Martin D. Dawson, Michael J. Strain, Benoit Guilhabert, Dimitars Jevtics, Alexander A. Lagatsky

Proceedings Volume PC12425, Smart Photonic and Optoelectronic Integrated Circuits 2023; PC124250N (2023) https://doi.org/10.1117/12.2646170
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

The development of advanced optoelectronic systems requires the intimate integration of multiple, different photonic materials and device structures at micron scales. A number of approaches are being explored to address this pressing challenge. Here we focus on soft-stamp-based transfer printing in both planar and roll based formats, to achieve a widely applicable capability in heterogeneous integration with micron-scale accuracy. We illustrate the capabilities of our custom tools by two examples, the first focusing on planar printing of GaN microlenses onto diamond substrates and waveguide facets and the second focusing on continuous roll-based printing of GaN micro-LED pixels at quarter VGA resolution.

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Citation Download Citation

Martin D. Dawson, Michael J. Strain, Benoit Guilhabert, Dimitars Jevtics, and Alexander A. Lagatsky "Planar- and roll-based transfer printing for scalable heterogeneous integration", Proc. SPIE PC12425, Smart Photonic and Optoelectronic Integrated Circuits 2023, PC124250N (17 March 2023); https://doi.org/10.1117/12.2646170

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KEYWORDS

Printing

Gallium nitride

Microlens

Optical alignment

Photonic integrated circuits

Polishing

Semiconducting wafers

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