Improved radiation detectors on 4H-SiC epilayers by edge termination

Cihan Oner; Towhid A. Chowdhury; Rahmi O. Pak; Krishna C. Mandal

doi:10.1117/12.2238874

30 September 2016 Improved radiation detectors on 4H-SiC epilayers by edge termination

Cihan Oner, Towhid A. Chowdhury, Rahmi O. Pak, Krishna C. Mandal

Proceedings Volume 9968, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics XVIII; 99680M (2016) https://doi.org/10.1117/12.2238874
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

We report the development of an edge termination by depositing thin Si₃N₄ passivating film on 4H-SiC epilayer based radiation detector. The edge termination method is shown to be very effective for improving both the detector leakage current and radiation detection performance compared with that of a conventional detector fabricated from the same parent wafer. The detector leakage current was found to have improved two orders of magnitude. Significant improvement in radiation detection performance was shown from alpha spectroscopy measurements prior and subsequent to Si₃N₄ edge termination. Deep Level Transient Spectroscopy (DLTS) measurements revealed a reduction in life-time killing defects of detectors with Si₃N₄ edge termination which could be related to the observed improvements in radiation detection performance.

Conference Presentation

Citation Download Citation

Cihan Oner, Towhid A. Chowdhury, Rahmi O. Pak, and Krishna C. Mandal "Improved radiation detectors on 4H-SiC epilayers by edge termination", Proc. SPIE 9968, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics XVIII, 99680M (30 September 2016); https://doi.org/10.1117/12.2238874

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