Paper
27 September 2016 Control of deformable mirrors including a nonlinear modal model for air gap damping
Michael Böhm, Oliver Sawodny
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Abstract
In this paper, we present nonlinear pressure dynamics as an extension to a linear distributed parameters model of a deformable mirror. The original, undamped model is recalled and measurement results are shown supporting the need for a damping model which includes the pressure dynamics of the air gap behind the mirror membrane. We will derive the damping coefficients to match our measurement results. Based on the mew model, we will derive a modal feedforward and feedback control law for 88 actuators based on only 3 position sensors and show simulation results to support the algorithm's effectiveness.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael Böhm and Oliver Sawodny "Control of deformable mirrors including a nonlinear modal model for air gap damping", Proc. SPIE 9953, Optical Modeling and Performance Predictions VIII, 995303 (27 September 2016); https://doi.org/10.1117/12.2237839
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Cited by 1 scholarly publication.
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KEYWORDS
Mirrors

Deformable mirrors

Feedback control

Actuators

Performance modeling

Position sensors

Solids

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