Modeling of microelectromechanical systems deformable mirror diffraction grating

Dan Sirbu; Eugene Pluzhnik; Ruslan Belikov

doi:10.1117/12.2232335

29 July 2016 Modeling of microelectromechanical systems deformable mirror diffraction grating

Dan Sirbu, Eugene Pluzhnik, Ruslan Belikov

Proceedings Volume 9904, Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave; 990466 (2016) https://doi.org/10.1117/12.2232335
Event: SPIE Astronomical Telescopes + Instrumentation, 2016, Edinburgh, United Kingdom

Abstract

Model-based wavefront control methods such as electric field conjugation require accurate optical propagation models to create high-contrast regions in the focal plane using deformable mirrors (DMs). Recently, it has been shown that it is possible to exceed the controllable outer-working angle imposed by the Nyquist limit based on the number of actuators by utilizing a diffraction grating. The print-through pattern on MEMS-based DMs formed during the fabrication process creates both an amplitude and a phase diffraction grating that can be used to enable Super-Nyquist wavefront control. Using interferometric measurements of a DM-actuator, we develop a DM-diffraction grating model. We compare the total energy enclosed in the first diffraction order due to the phase, amplitude, and combined phase-amplitude gratings with laboratory measurements.

Citation Download Citation

Dan Sirbu, Eugene Pluzhnik, and Ruslan Belikov "Modeling of microelectromechanical systems deformable mirror diffraction grating", Proc. SPIE 9904, Space Telescopes and Instrumentation 2016: Optical, Infrared, and Millimeter Wave, 990466 (29 July 2016); https://doi.org/10.1117/12.2232335

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