Paper
21 April 2016 Design and fabrication of 2D tungsten photonic crystal for thermophotovoltaic systems with high efficiency
Jong-Moo Kim, Hyeong-Hwan Jin, Da-Som Kim, Sun-Kyung Kim, KeumHwan Park, Young-Seok Kim
Author Affiliations +
Abstract
We have investigated simulation, fabrication, 2D tungsten PhC for selective emitters of TPV system. Using finite difference time domain simulations, we designed and fabricated a 2D W PhC with cylindrical cavities of diameter from 490 nm to 555 nm, depth 1.5 μm. This structure may have a cutoff near the wavelength of 2.0 μm. A marked enhancement is expected in the emissivity of the 2D W PhC at wavelengths below 2.0μm compared to flat W. By using standard silicon processing techniques that are simple, efficient and easily scalable, selective emitting structure can be fabricated at lower cost and reduced complexity of individual components.
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Jong-Moo Kim, Hyeong-Hwan Jin, Da-Som Kim, Sun-Kyung Kim, KeumHwan Park, and Young-Seok Kim "Design and fabrication of 2D tungsten photonic crystal for thermophotovoltaic systems with high efficiency", Proc. SPIE 9885, Photonic Crystal Materials and Devices XII, 98851H (21 April 2016); https://doi.org/10.1117/12.2227614
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KEYWORDS
Tungsten

Chromium

Lithography

Etching

Photonic crystals

Photonic crystals

Reactive ion etching

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