Miniaturized NIR scanning grating spectrometer for use in mobile phones

Jens Knobbe; Tino Pügner; Heinrich Grüger

doi:10.1117/12.2223759

12 May 2016 Miniaturized NIR scanning grating spectrometer for use in mobile phones

Jens Knobbe, Tino Pügner, Heinrich Grüger

Proceedings Volume 9855, Next-Generation Spectroscopic Technologies IX; 985502 (2016) https://doi.org/10.1117/12.2223759
Event: SPIE Commercial + Scientific Sensing and Imaging, 2016, Baltimore, MD, United States

Abstract

An extremely miniaturized scanning grating spectrometer at the size of a sugar cube has been developed at Fraunhofer IPMS. To meet the requirements for the integration into a mobile phone a new system approach has been pursued. The key component within the system is a silicon-based deflectable diffraction grating with an integrated driving mechanism. A first sample of the new spectrometer was built and characterized. It was found to have a spectral range from 950 nm to 1900 nm at a resolution of 10 nm. The results show that the performance of the new MEMS spectrometer is in good agreement with the requirements for mobile phone integration.

Citation Download Citation

Jens Knobbe, Tino Pügner, and Heinrich Grüger "Miniaturized NIR scanning grating spectrometer for use in mobile phones", Proc. SPIE 9855, Next-Generation Spectroscopic Technologies IX, 985502 (12 May 2016); https://doi.org/10.1117/12.2223759

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