Paper
20 April 2016 Identification of ground motion features for high-tech facility under far field seismic waves using wavelet packet transform
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Abstract
Seismic records collected from earthquake with large magnitude and far distance may contain long period seismic waves which have small amplitude but with dominant period up to 10 sec. For a general situation, the long period seismic waves will not endanger the safety of the structural system or cause any uncomfortable for human activity. On the contrary, for those far distant earthquakes, this type of seismic waves may cause a glitch or, furthermore, breakdown to some important equipments/facilities (such as the high-precision facilities in high-tech Fab) and eventually damage the interests of company if the amplitude becomes significant. The previous study showed that the ground motion features such as time-variant dominant frequencies extracted using moving window singular spectrum analysis (MWSSA) and amplitude characteristics of long-period waves identified from slope change of ground motion Arias Intensity can efficiently indicate the damage severity to the high-precision facilities. However, embedding a large hankel matrix to extract long period seismic waves make the MWSSA become a time-consumed process. In this study, the seismic ground motion data collected from broadband seismometer network located in Taiwan were used (with epicenter distance over 1000 km). To monitor the significant long-period waves, the low frequency components of these seismic ground motion data are extracted using wavelet packet transform (WPT) to obtain wavelet coefficients and the wavelet entropy of coefficients are used to identify the amplitude characteristics of long-period waves. The proposed method is a timesaving process compared to MWSSA and can be easily implemented for real-time detection. Comparison and discussion on this method among these different seismic events and the damage severity to the high-precision facilities in high-tech Fab is made.
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Shieh-Kung Huang, Chin-Hsiung Loh, and Chin-Tsun Chen "Identification of ground motion features for high-tech facility under far field seismic waves using wavelet packet transform", Proc. SPIE 9803, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2016, 98032D (20 April 2016); https://doi.org/10.1117/12.2219543
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KEYWORDS
Earthquakes

Wavelets

Semiconducting wafers

Scanners

Wave propagation

Feature extraction

Continuous wavelet transforms

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