Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW

Rui-Jun Zhang; Si-Tian Gao; Wei Li; Ben-Yong Chen; Yu-Shu Shi; Qi Li

doi:10.1117/12.2214428

5 November 2015 Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW

Rui-Jun Zhang, Si-Tian Gao, Wei Li, Ben-Yong Chen, Yu-Shu Shi, Qi Li

Proceedings Volume 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015; 979514 (2015) https://doi.org/10.1117/12.2214428
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held June-July 2015, 2015, Hefei, Suzhou, and Harbin, China

Abstract

A control and measuring system of two-dimensional nanopositioning stage is designed for the multiple selection and combinations control based on LabVIEW. The signal generator of the system can not only generate the commonly used control signals such as sine, square, triangle and sawtooth waves, but also generate special signals such as trapezoidal wave and step wave with DAQ data acquisition card. The step wave can be triggered by the other signals for the strict timing corresponding relation between X-Y control signals. Finally, the performance of the control system of two-dimensional nanopositioning stage is conducted by the heterodyne interferometer. The results show that the operation of the system is stable and reliable and the noise peak - valley value is superior to 2nm while the stage moving with 6nm step. The system can apply to the field requiring the precise control to the positioning stage in nano-measurement and metrology.

Citation Download Citation

Rui-Jun Zhang, Si-Tian Gao, Wei Li, Ben-Yong Chen, Yu-Shu Shi, and Qi Li "Control and measuring system of a two-dimensional scanning nanopositioning stage based on LabVIEW", Proc. SPIE 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015, 979514 (5 November 2015); https://doi.org/10.1117/12.2214428

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