Improved cost-effectiveness of the block co-polymer anneal process for DSA

Hari Pathangi; Maarten Stokhof; Werner Knaepen; Varun Vaid; Arindam Mallik; Boon Teik Chan; Nadia Vandenbroeck; Jan Willem Maes; Roel Gronheid

doi:10.1117/12.2220043

1 April 2016 Improved cost-effectiveness of the block co-polymer anneal process for DSA

Hari Pathangi, Maarten Stokhof, Werner Knaepen, Varun Vaid, Arindam Mallik, Boon Teik Chan, Nadia Vandenbroeck, Jan Willem Maes, Roel Gronheid

Author Affiliations +

Proceedings Volume 9777, Alternative Lithographic Technologies VIII; 97771Z (2016) https://doi.org/10.1117/12.2220043
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

This manuscript first presents a cost model to compare the cost of ownership of DSA and SAQP for a typical front end of line (FEoL) line patterning exercise. Then, we proceed to a feasibility study of using a vertical furnace to batch anneal the block co-polymer for DSA applications. We show that the defect performance of such a batch anneal process is comparable to the process of record anneal methods. This helps in increasing the cost benefit for DSA compared to the conventional multiple patterning approaches.

Citation Download Citation

Hari Pathangi, Maarten Stokhof, Werner Knaepen, Varun Vaid, Arindam Mallik, Boon Teik Chan, Nadia Vandenbroeck, Jan Willem Maes, and Roel Gronheid "Improved cost-effectiveness of the block co-polymer anneal process for DSA", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771Z (1 April 2016); https://doi.org/10.1117/12.2220043

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available