MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi; B. Guo; R. Mannila; A. Rissanen

doi:10.1117/12.2214710

15 March 2016 MOEMS FPI sensors for NIR-MIR microspectrometer applications

A. Akujärvi, B. Guo, R. Mannila, A. Rissanen

Proceedings Volume 9760, MOEMS and Miniaturized Systems XV; 97600M (2016) https://doi.org/10.1117/12.2214710
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

This paper presents near- and mid- infrared (NIR-MIR) wavelength range optical MEMS Fabry-Perot interferometers (FPIs) developed for automotive and multi-gas sensing applications. MEMS FPI platform for NIR-range consist of LPCVD (low-pressure chemical vapour) deposited polySi-SiN λ/4-thin film Bragg reflectors, with the air gap formed by sacrificial SiO2 etching in HF vapour. Characterization results for the NIR MFPI devices for λ = 1.5 – 2.0 μm show resolution of 15 nm at the optimization wavelength of 1750 nm. We also present a MIR-range MEMS FPI for λ = 2.5 – 3.5 μm, which utilizes silicon and air in within the Bragg reflector structure to provide a high contrast for improved resolution. Characterization results show a FWHM (Full Width Half Maximum) of 20 nm in comparison to the 50 nm resolution provided by earlier MEMS FPIs realized for hydrocarbon sensing with conventional CVD-thin film materials. The improved resolution and the extended operation region shows potential to enable simultaneous sensing of CO2 and multiple hydrocarbons.

Citation Download Citation

A. Akujärvi, B. Guo, R. Mannila, and A. Rissanen "MOEMS FPI sensors for NIR-MIR microspectrometer applications", Proc. SPIE 9760, MOEMS and Miniaturized Systems XV, 97600M (15 March 2016); https://doi.org/10.1117/12.2214710

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