Generic heterogeneously integrated III-V lasers-on-chip with metal-coated etched-mirror

Chee-Wei Lee; Doris Keh-Ting Ng; Min Ren; Yuan-Hsing Fu; Anthony Yew Seng Kay; Vivek Krishnamurthy; Jing Pu; Ai Ling Tan; Febiana Tjiptoharsono; Soo Bin Choo; Qian Wang

doi:10.1117/12.2218395

3 May 2016 Generic heterogeneously integrated III-V lasers-on-chip with metal-coated etched-mirror

Chee-Wei Lee, Doris Keh-Ting Ng, Min Ren, Yuan-Hsing Fu, Anthony Yew Seng Kay, Vivek Krishnamurthy, Jing Pu, Ai Ling Tan, Febiana Tjiptoharsono, Soo Bin Choo, Qian Wang

Author Affiliations +

Proceedings Volume 9751, Smart Photonic and Optoelectronic Integrated Circuits XVIII; 97510M (2016) https://doi.org/10.1117/12.2218395
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We demonstrate electrically-pumped III-V quantum-well lasers bonded on SiO₂ with a metal-coated etched-mirror. The metal-coated etched-mirror allow the lasers to be used as on-chip laser, but our process design make sure that it requires no additional fabrication step to fabricate the metal-coated etched mirror. The bonded III-V on SiO₂ also permits tight laser mode confinement in the active region due to high index contrast between III-V and SiO₂. Moreover, it promises a flexible choice of host substrate, in which the silicon substrate could also be replaced with other materials. The laser devices demonstrated have the lowest threshold of 50 mA, a maximum output power of 9 mW and a differential quantum efficiency of 27.6%.

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Chee-Wei Lee, Doris Keh-Ting Ng, Min Ren, Yuan-Hsing Fu, Anthony Yew Seng Kay, Vivek Krishnamurthy, Jing Pu, Ai Ling Tan, Febiana Tjiptoharsono, Soo Bin Choo, and Qian Wang "Generic heterogeneously integrated III-V lasers-on-chip with metal-coated etched-mirror", Proc. SPIE 9751, Smart Photonic and Optoelectronic Integrated Circuits XVIII, 97510M (3 May 2016); https://doi.org/10.1117/12.2218395

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KEYWORDS

Silica

Mirrors

Metals

Silicon

Waveguides

Laser damage threshold

Etching

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