Lithium niobate integrated photonic crystal and waveguides

Soon Thor Lim; Thomas Y-L. Ang; Ching Eng Png; Jun Deng; Aaron J. Danner

doi:10.1117/12.2209519

24 February 2016 Lithium niobate integrated photonic crystal and waveguides

Soon Thor Lim, Thomas Y-L. Ang, Ching Eng Png, Jun Deng, Aaron J. Danner

Proceedings Volume 9744, Optical Components and Materials XIII; 974413 (2016) https://doi.org/10.1117/12.2209519
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

In this work we successfully fabricated and measured PhCs patterned on a LiNbO₃ APE waveguide. SIMS data indicate that after 5 hours exchange time a PE layer of 3μm can be obtained. The depth of holes was 2μm by applying a large milling current. We presented experimental characterization of the PhC waveguide and a well-defined PBG was observed from the transmission spectra. An extinction ratio was estimated to be approximately 15dB. Optical transmission results indicate that deep air holes can lead to a sharp band edge. This PhC waveguide is a good candidate for further development of an ultra-compact, low-voltage LiNbO₃ modulator.

Citation Download Citation

Soon Thor Lim, Thomas Y-L. Ang, Ching Eng Png, Jun Deng, and Aaron J. Danner "Lithium niobate integrated photonic crystal and waveguides", Proc. SPIE 9744, Optical Components and Materials XIII, 974413 (24 February 2016); https://doi.org/10.1117/12.2209519

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KEYWORDS

Waveguides

Channel waveguides

Annealing

Crystals

Etching

Photonic crystals

Light wave propagation

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