Vacuum system for applying reflective coatings on large-size optical components using the method of magnetron sputtering

Alexander A. Azerbaev; Magomed A. Abdulkadyrov; Sergey P. Belousov; Aleksandr N. Ignatov; Timur R. Mukhammedzyanov

doi:10.1117/12.2241517

28 October 2016 Vacuum system for applying reflective coatings on large-size optical components using the method of magnetron sputtering

Alexander A. Azerbaev, Magomed A. Abdulkadyrov, Sergey P. Belousov, Aleksandr N. Ignatov, Timur R. Mukhammedzyanov

Author Affiliations +

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 968307 (2016) https://doi.org/10.1117/12.2241517
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Vacuum system for reflective coatings deposition on large-size optical components up to 4.0 m diameter using the method of magnetron sputtering was built at JSC LZOS. The technological process for deposition of reflective Al coating with protective SiO₂ layer was designed and approved. After climatic tests the lifetime of such coating was estimated as 30 years. Uniformity of coating thickness ±5% was achieved on maximum diameter 4.0 m.

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Alexander A. Azerbaev, Magomed A. Abdulkadyrov, Sergey P. Belousov, Aleksandr N. Ignatov, and Timur R. Mukhammedzyanov "Vacuum system for applying reflective coatings on large-size optical components using the method of magnetron sputtering", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 968307 (28 October 2016); https://doi.org/10.1117/12.2241517

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