Peter Z Takacs,1 Su-chen Kate Feng,1 Eugene L. Church,2 Shi-nan Qian,3 Wu-ming Liu4
1Brookhaven National Laboratory (United States) 2USA ARDEC (United States) 3University of Science and Technology of China (China) 4Institute of High Energy Physics (China)
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A new long-trace optical profiling instrument is now in operation at Brookhaven National Laboratory measuring surface figure and macro-roughness on large optical components, principally long cylindrical mirrors for use in synchrotron radiation beam lines. The non-contact measurement technique is based upon a pencil-beam interferometer system. The optical head is mounted on a linear air bearing slide and has a free travel range of nearly one meter. We are able to sample surface spatial periods between 1 mm (the laser beam diameter) and 1 m. The input slope data is converted to surface height by a Fourier filtering technique which distributes the random noise error contributions evenly over the entire trace length. A number of optical components have been measured with the instrument. Results are presented for fused silica cylinders 900 mm and 600 mm in length and for a fused silica toroid and several electroless nickel-plated paraboloids.
Peter Z Takacs,Su-chen Kate Feng,Eugene L. Church,Shi-nan Qian, andWu-ming Liu
"Long Trace Profile Measurements On Cylindrical Aspheres", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948082
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Peter Z Takacs, Su-chen Kate Feng, Eugene L. Church, Shi-nan Qian, Wu-ming Liu, "Long Trace Profile Measurements On Cylindrical Aspheres," Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948082