Absolute Interferometric Testing Of Spherical Surfaces

Bruce E. Truax

doi:10.1117/12.948058

29 January 1989 Absolute Interferometric Testing Of Spherical Surfaces

Bruce E. Truax

Proceedings Volume 0966, Advances in Fabrication and Metrology for Optics and Large Optics; (1989) https://doi.org/10.1117/12.948058
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

In typical interferometric testing the part under test is measured against a reference standard. The measured result is the difference between the errors in the test and reference surfaces plus any additional errors introduced by the interferometer. For accurate qualification of the reference surface it is necessary to employ a technique that can measure the part absolutely. This paper examines an existing technique) for absolute testing of spherical surfaces which produces a map of the entire surface. The capabilities of this technique, error sources, and experimental data will be examined.

Citation Download Citation

Bruce E. Truax "Absolute Interferometric Testing Of Spherical Surfaces", Proc. SPIE 0966, Advances in Fabrication and Metrology for Optics and Large Optics, (29 January 1989); https://doi.org/10.1117/12.948058

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