Planar waveguide Michelson interferometer fabricated by using 157nm mask laser micromachining

Haihong Bao; Zengling Ran; Xuezhong Wu; Ke Yang; Yuan Jiang; Yunjiang Rao

doi:10.1117/12.2184265

1 July 2015 Planar waveguide Michelson interferometer fabricated by using 157nm mask laser micromachining

Haihong Bao, Zengling Ran, Xuezhong Wu, Ke Yang, Yuan Jiang, Yunjiang Rao

Proceedings Volume 9655, Fifth Asia-Pacific Optical Sensors Conference; 965531 (2015) https://doi.org/10.1117/12.2184265
Event: Fifth Asia Pacific Optical Sensors Conference, 2015, Jeju, Korea, Republic of

Abstract

A Michelson interferometer is fabricated on silica planar waveguide by using the one-step technology based on 157nm mask laser micromachining. The fabrication time for one device is ~10s. Experimental results show that such an interferometer has an excellent fringe contrast of >20dB. Its temperature and refractive index (RI) responses are tested by observing the wavelength shift of the interferometric fringes, which shows linear characteristics with a thermo-coefficient of ~9.5pm/°C and a RI-coefficient of ~36.7nm/RIU, respectively. The fabrication technology may pave a new way for direct writing of planar silica waveguide devices for sensing applications with high efficiency and quality.

Citation Download Citation

Haihong Bao, Zengling Ran, Xuezhong Wu, Ke Yang, Yuan Jiang, and Yunjiang Rao "Planar waveguide Michelson interferometer fabricated by using 157nm mask laser micromachining", Proc. SPIE 9655, Fifth Asia-Pacific Optical Sensors Conference, 965531 (1 July 2015); https://doi.org/10.1117/12.2184265

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