Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors

S. Matsuyama; H. Kino; S. Yasuda; Y. Kohmura; H. Okada; T. Ishikawa; K. Yamauchi

doi:10.1117/12.2188583

17 September 2015 Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors

S. Matsuyama, H. Kino, S. Yasuda, Y. Kohmura, H. Okada, T. Ishikawa, K. Yamauchi

Proceedings Volume 9592, X-Ray Nanoimaging: Instruments and Methods II; 959208 (2015) https://doi.org/10.1117/12.2188583
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Advanced Kirkpatrick-Baez mirror optics using two monolithic imaging mirrors was developed to realize an achromatic, high-resolution, and a high-stability full-field X-ray microscope. The mirror consists of an elliptical section and a hyperbolic section on a quartz glass substrate, in which the geometry follows the Wolter (type I) optics rules. A preliminary test was performed at SPring-8 using X-rays monochromatized to 9.881 keV. A 100-nm feature on a Siemens star chart could be clearly observed.

Citation Download Citation

S. Matsuyama, H. Kino, S. Yasuda, Y. Kohmura, H. Okada, T. Ishikawa, and K. Yamauchi "Development of achromatic full-field hard x-ray microscopy with two monolithic imaging mirrors", Proc. SPIE 9592, X-Ray Nanoimaging: Instruments and Methods II, 959208 (17 September 2015); https://doi.org/10.1117/12.2188583

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