Projected fringe profilometry for metal surfaces

Wei-Hung Su; Bo-Chin Huang

doi:10.1117/12.2190220

8 September 2015 Projected fringe profilometry for metal surfaces

Wei-Hung Su, Bo-Chin Huang

Proceedings Volume 9586, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications IX; 95861G (2015) https://doi.org/10.1117/12.2190220
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

A non-scanning method to describe the 3D profile of a metal surface is proposed. A fringe pattern is posited in front of the metal surface. A virtual image of the fringe pattern is formed behind the metal surface. Fringes on the virtual image are deformed by topography of the metal object. Thus, phase of the deformed fringes is desirable to retrieve the profile of the metal surface.

Citation Download Citation

Wei-Hung Su and Bo-Chin Huang "Projected fringe profilometry for metal surfaces", Proc. SPIE 9586, Photonic Fiber and Crystal Devices: Advances in Materials and Innovations in Device Applications IX, 95861G (8 September 2015); https://doi.org/10.1117/12.2190220

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