Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage

Fazhi Song; Yan Wang; Xinglin Chen; Ping He

doi:10.1117/12.2186912

20 August 2015 Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage

Fazhi Song, Yan Wang, Xinglin Chen, Ping He

Proceedings Volume 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII; 95560P (2015) https://doi.org/10.1117/12.2186912
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

As a high-precision servo motion platform, the dual-stage lithographic system uses lots of long-stroke air-bearing linear motors to achieve rapid positioning. Residual vibration, resulting from direct drive, almost zero damping, parallel decoupling structure and high velocity, leads to too long settling time and is one of the key factors in slowing the speed of positioning. To suppress the residual vibration and realize the high positioning precision in shorter settling time, this paper designs feedforward controller with input shaping algorithm for the rotary motor. Traditional input shaper is sensitive to system models and it is very difficult to get the parameters. A parameter self-learning method based on PSO(Particle Swarm Optimization) is proposed in this paper. The simulation of the system is performed by MATLAB/Simulation. The experimental results indicate that the input shaping algorithm proposed in this paper brings about significant reduction in the positioning time of the dual-stage.

Conference Presentation

Citation Download Citation

Fazhi Song, Yan Wang, Xinglin Chen, and Ping He "Research on input shaping algorithm for rapid positioning of ultra-precision dual-stage", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 95560P (20 August 2015); https://doi.org/10.1117/12.2186912

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available