Enlarging applicability domain of the C method with piecewise linear parameterization: gratings of deep and smooth profiles

Xihong Xu; Lifeng Li

doi:10.1117/12.2184391

21 June 2015 Enlarging applicability domain of the C method with piecewise linear parameterization: gratings of deep and smooth profiles

Xihong Xu, Lifeng Li

Author Affiliations +

Proceedings Volume 9526, Modeling Aspects in Optical Metrology V; 952605 (2015) https://doi.org/10.1117/12.2184391
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We present two piecewise linear parameterization schemes for the parameterized coordinate transformation method (the C method) to enable it to model gratings of deep and smooth grooves. This work generalizes and elaborates our previous work [Opt. Lett. 39(23), 6644 (2014)]. The previous bilinear transformation is replaced with a general multi-linear transformation. This gives us flexibility to handle more general grating profiles while retaining the simplicity of the linear transformation. We give some general, simple, and empirical rules on composing the piecewise linear transformation function. Both enlarged convergence range and increased groove depth-to-period ratio, which can be at least 10, are achieved with the parameterized C method for a wide class of smooth grating profiles.

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Xihong Xu and Lifeng Li "Enlarging applicability domain of the C method with piecewise linear parameterization: gratings of deep and smooth profiles", Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952605 (21 June 2015); https://doi.org/10.1117/12.2184391

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