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The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from this book: Author(s), “Title of Paper,” in Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, edited by José L. Sánchez-Rojas, Riccardo Brama, Proceedings of SPIE Vol. 9517 (SPIE, Bellingham, WA, 2015) Article CID Number. ISSN: 0277-786X ISBN: 9781628416398 Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time) · Fax +1 360 647 1445 Copyright © 2015, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/15/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library. Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which:
The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. AuthorsNumbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B…0Z, followed by 10-1Z, 20-2Z, etc. Ababneh, A., 1J Alazzam, Anas, 28 Almond, Heather J. A., 06 Anchutin, Stepan, 25 Andrs, O., 1H Arregui, F. J., 1U, 1V, 1W Assmann, H., 0W Augenstein, A., 0W Ayerden, N. Pelin, 1M, 1N Bagolini, Alvise, 0S Bakin, Andrey, 23 Balsamo, Domenico, 2I Barth, Stephan, 04 Bartzsch, Hagen, 04 Baselt, T., 0W Becker, Th., 2F Beeby, S. P., 03, 0P Bellido, J. C., 1Y Bellutti, Pierluigi, 0S Benini, Luca, 2I Benkler, Manuel, 21 Berger, Achim, 2E Bergmann, Andreas, 20 Bey-Temsamani, Abdellatif, 2H Biehl, Saskia, 0Y Bierer, B., 14 Bittner, A., 07, 1C, 1E Blažević, D., 12, 1F Bolzmacher, Christian, 10, 1S Bonaldi, M., 1O Borrielli, A., 1O Brand, Uwe, 0V, 19, 1X, 23 Britkov, O., 1Z Brunelli, Davide, 2I Buetefisch, Sebastian, 0V Cabitto, A., 2M Calaza, C., 2C Capoccia, Giovanni, 0S Cataliotti, F. S., 1O Cekas, Elingas, 22 Chakarov, Dimiter, 1Q Chaplygin, Yuriy, 25 Cîrtoaje, Cristina, 1G Cola, Adriano, 0S Concettoni, Enrico, 18 Conedera, V., 16 Correia, J. H., 0L Corres, J. M., 1U Costa, C. G., 0L Cristalli, Cristina, 18 Daus, Alwin, 1X Dávila, D., 2C de Graaf, Ger, 1M, 1N De Pasquale, Giorgio, 0H Dehé, Alfons, 0M, 1L Dejous, C., 16 Del Moral, Jésica, 2J Del Villar, I., 1U Deligeorgis, G., 16 Dempwolf, S., 09 Divins, N. J., 2D Doering, Lutz, 0V, 1X, 23 Donmez, I., 2C Donoso, A., 1Y Dragoi, V., 08 Drexler, P., 1A, 1K Dzuba, J., 1l, 21 Ecke, R., 09 Elefsiniotis, A., 2F Endrödy, Csaba, 0K Fiala, P., 1A, 1K Fidler, Franz, 0J Fioravanti, Matteo, 18 Fonseca, L., 2C Frach, Peter, 04, 29 Frank, Thomas, 1X Friedl, M., 1A Fruehauf, Joachim, 0V Gadea, G., 2C Gao, Sai, 0V, 19 Garbayo, I., 2D Garcia, H., 16 Gerlach, Gerald, 04, 29 Geßner, T., 09 Ghaderi, Mohammadamir, 1M, 1N Giammarini, Marco, 18 Giese, A., 0T Gillinger, M., 07 Glacer, C., 0M Glažar, V., 12 Gloess, Daniel, 04, 29 Goehlich, A., 0T Goertz, M., 0T Goicoechea, J., 1W Gomes, J. S., 0L González, Erika, 2J Gonzalez, K., 1V Gostner, Johanna, 13 Gottfried, K., 09 Gregov, G., 12 Greiner, A., 0W Grewe, Adrian, 0K Hadas, Zdenek, 0N, 1H Hafez, Moustafa, 1S Hahn, S., 19 Hallil, H., 16 Hambeck, Christian, 0J Harrer, Stefan xxi Hartmann, P., 0W Hautefeuille, Mathieu, 2J Hecker, Dominic, 29 Hernaez, M., 1U, 1V, 1W Hernando-García, J., 1J Hiller, Karla, 0V, 19 Hirsch, Soeren, 0F Hoffmann, Martin, 0K, 0Z Hofmann, L., 09 Horak, Peter, 0A Hörmann, Leander B., 2E Huber, J., 15 Iannacci, Jacopo, 05, 0O, 0S, 1T Isidori, Daniela, 18 Ižák, T., 1l Janusas, Giedrius, 22 Jiménez-Márquez, F., 0C, 1P Jirásek, V., 1I Jogschies, Lisa, 1R Kamenar, E., 12 Kenyon, Anthony J., 0A Khashan, Saud A., 28 Kiziroglou, M. E., 2F Knechtel, R., 09 Kneer, J., 14 Knoll, Thorsten, 20 Koch, E., 0W Kochurina, Elena, 25 Kokorakis, N., 2F Korobova, Natalia, 1Z, 25 Kosolapov, Andrey, 25 Kraft, M., 0T Krivec, Matic, 13 Kucera, M., 0C, 1T, 1Y Kuenzig, Thomas, 0M, 1L Kutiš, V., 1I Lahti, M. 0R Lalinský, T., 1I, 21 Lambruschini, P., 2M Lancranjan, Ion I., 2A, 2B Le Guelvouit, Valentin, 10 Leeb, Walter, 0J Leighton, Glenn J. T., 06 Leitner, Raimund, 13 Leopold, Steffen, 0Z Li, Zhi, 0V Liu, Huiyun, 0A Llorca, J., 2D López, Jehú, 2J Lucibello, Andrea, 0S Lucki, Michal, 21 Lucklum, Ralf, 0F Maćešić, S., 12 Manione, Roberto, 2K Manzaneque, T., 0C, 1J Marcelli, Romolo, 0S Marcoň, P., 1A Marconi, L., 1O Margesin, Benno, 0Q, 0S Marin, F., 1O Marino, F., 1O Marković, K., 12, 27 Mathew, Bobby, 28 Matias, I. R., 1U, 1V, 1W Mayrhofer, P. M., 1C Mehner, Hannes, 0K, 0Z Miclos, Sorin, 2A, 2B Mikheev, A., 1Z Mitcheson, P. D., 2F Modes, Thomas, 04 Morata, A., 2C, 2D Moriarty, Roy J., 06 Motoc, Cornelia, 1G Mulloni, V., 0Q Nasswettrova, A., 1A, 1K Neri, Bruno, 2L Nešpor, D., 1A, 1K Ng, Wing H., 0A Nguyen, K., 24 Nicolay, P., 07 Nikolaou, I., 16 Nußbaum, Dominic, 20 Ompusunggu, Agusmian P., 2H Oseev, Aleksandr, 0F Pabo, E., 08 Paetsch, Nancy, 0Y Palevicius, Arvydas, 22 Paleviciute, Ieva, 22 Palzer, S., 14 Pandraud, G., 1O Peiner, Erwin, 0B, 0V, 1X, 23 Persano, Anna, 0S Petrescu, Emil, 1G Pfusterschmied, G., 0C Pham, D., 0M Pieralisi, Marco, 18 Pla, D., 2D Podoliak, Nina, 0A Pontin, A., 1O Pozzi, Michele, 06 Priller, Peter, 2E Prodi, G. A., 1O Proietti, Emanuela, 0S Quaranta, Fabio, 0S Raggio, M., 2M Ramoska, Evaldas, 22 Rebière, D., 16 Reitterer, Jörg, 0J Reuter, D., 09 Rissing, Lutz, 1R Rittinger, Johannes, 1R Rivero, Pedro J., 1W Rodríguez-Rey, J., 1P Ruiz, D., 1Y Ruiz-Díez, V., 0C, 1J Rumposch, Christian, 0Y Rýger, I., 1l, 21 Sabaté, N., 2D Saint Julien-Wallsee, Ferdinand, 0J Sakalys, Rokas, 22 Saleem, Muhammad Mubasher, 0H Salleras, M., 2C, 2D Salzburger, Lukas, 2E Sanchez, P., 1V Sánchez-Rojas, José L., 0C, 1J, 1P, 1Y Santos, J. D., 2C Saponara, Sergio, 2L Savastru, Dan, 2A, 2B Savastru, Roxana, 2A, 2B Schmid, Gerhard, 0J Schmid, Ulrich, 07, 0C, 0J, 0O, 1C, 1E, 1T, 1Y, 2F Schmidt, Marc-Peter, 0F Schneider, M., 07 Scholz, M., 24 Schrag, Gabriele, 0M, 1L, 24 Schulz, S. E., 09 Schwebke, Silvan, 0Z Seginak, J., 1A Seidel, H., 1J Seidelmann, U., 24 Serra, E., 0O, 10, 1T Shepelev, S., 1Z Shulev, Assen, 0X, 1Q Siciliano, Pietro, 0S Singule, V., 1H Sinzinger, Stefan, 0K Smilek, Jan, 0N, 1H Socorro, A. B., 1U, 1W Somà, Aurelio, 0H Sordo, G., 05, 0O, 0Q, 1T Springer, Andreas, 2E Stavreva, Galina, 0X, 1Q Stavrov, Vladimir, 0X, 1Q Steinbauer, M., 1K Stewart, William J., 0A Stoian, Victor, 1G Suchaneck, Gunnar, 04 Taptimthong, Piriya, 1R Tarancón, A., 2C, 2D Taudt, Ch., 0W Taurino, Antonietta, 0S Timoshenkov, Sergey, 1Z, 25 Todorov, Vencislav, 0X Toh, T. T., 2F Toledo, J., 0C, 1J Úbeda, J., 1P Überall, Florian, 13 Uhde, Erik, 0B Vähä-Heikkilä, T. 0R Vanko, G., 1I, 21 Vázquez, J., 1P Velázquez, Víctor, 2J Vetiska, V., 1H Villani, Clemente, 2I Vogt, H., 0T Vojs, M., 1I Völlmeke, Stefan, 23 Waag, Andreas, 0B, 23 Wachutka, Gerhard, 0M, 1L Waegli, Peter, 2G Waldner, Roland, 13 Walk, C., 0T Wasisto, Hutomo Suryo, 0B, 1X, 23 Wieland, Robert, 24 Wistrela, E., 0C, 1E Wolffenbuttel, Reinoud F., 0I, 0L, 1M, 1N Wöllenstein, J., 14, 15 Wright, S. W., 2F Wu, Jiang, 0A Wu, Wenze, 0B Wurz, Marc C., 1R Xu, Min, 0V Yeatman, E. M., 2F Yu, Feng, 23 Yudanto, Risang, 2H Zamarreño, C. R., 1V Zehetner, J., 21 Zelenika, S., 12, 1F, 27 Zhu, D., 03, 0P Zophoniasson, Harald, 1S Zywitzki, Olaf, 04 Conference CommitteesSymposium Chair Symposium Co-chairs
Symposium Local Co-chair Part A Smart Sensors, Actuators, and MEMS VII Conference Chair Conference Co-chairs
Conference Programme Committee
Session Chairs
Part B Cyber Physical Systems Conference Chair Conference Co-chairs
Conference Programme Committee
Session Chairs Introduction to Part A: Smart Sensors, Actuators, and MEMS VIIThe conference ‘Smart Sensors, Actuators and MEMS’ took place in Barcelona, Spain, from 4 May to 6 May, 2015. The interdisciplinary spirit of the event was displayed by a wide range of topics based on the latest research results on the frontiers of microtechnology. Therefore, sessions focused on design, material and fabrication aspects, on micromachined sensors and actuators for the determination of biological, physical and chemical quantities as well as on reliability issues. Moreover, optical and RF MEMS have been presented and more application oriented topics such as energy scavengers, and low power management systems, were discussed. Due to this broad range of topics, researchers coming from academia and industry, with their specific backgrounds, created a very stimulating atmosphere for the exchange of new ideas. Besides the high quality of the oral and poster presentations, I would like to highlight the three invited talks, the first given by Stephen P. Beeby, from University of Southampton (United Kingdom), on miniaturisation and applications in vibration energy harvesting, the second by Reinoud F. Wolffenbuttel, from Technische Universiteit Delft (Netherlands), on MEMS-based optical microspectrometers, and last, but not least, by Uwe Brand, from, Physikalisch-Technische Bundesanstalt (Germany), focusing on calibration standards for high precision metrology. I would like to thank all participants for their individual contributions which made the conference a successful event in the international conference calendar. Special thanks go to Ulrich Schmid, Thomas Becker, Jacopo Iannacci and Carles Cané, for organising the symposium, to SPIE staff and the Co-chairs Erwin Peiner (Technische Universität Braunschweig, Germany) and José Correia, (Universidade do Minho, Portugal). Finally, I would like to thank the members of the Technical Programme Committee for reviewing the abstracts, especially those who served as session chairs. José L. Sánchez-Rojas Introduction to Part B: Cyber Physical SystemsIt is with great pleasure we met you at the 1st SPIE Conference on Cyber-Physical Systems. It has been a very interesting event in which authors both from industry and academia had the chance to get in touch and exchange ideas. We really hope they were able to broaden their network of contacts while hopefully finding new ways to cooperate or new market chances. We are living in one of the most exciting moments in the history of communication and embedded computing, the rise of the Internet of Things. With a forecast of 30 billion connected devices in the next few years, market and research opportunities are growing day by day. With this in mind we tried to shape the Cyber-Physical Systems Conference stressing both the communication and self-sufficiency needs of these distributed systems. By letting wireless links to meet CPSs, new and unpredictable ways of interaction between smart-objects and the surrounding environment will be enabled. Let me personally thank all participants and authors that, with their contributions, made this conference a great beginning. We are now working on the next edition of the Cyber-Physical Systems Conference, and we are eager to meet you all there, making this event the preferred meeting for a new and sparkling CPS community! It has been a real pleasure and an honor to work with Alessandro Bertacchini (Università degli Studi di Modena e Reggio, Italy) and Florian Hammer (Linz Center of Mechatronics, Austria) while organizing this event. Their commitment and dedication have been the driving force of this conference. Special thanks go to Valerio Frascolla (Intel, GmbH, Germany) serving as Session Chair in an exemplar way. Together with them, I would also like to thank our entire Programme Committee, which allowed us, with its invaluable work, to meet quality standards this first SPIE Conference on Cyber-Physical Systems deserved. Riccardo Brama |
