Characterization of MeV iOn-Implanted GainAs/GaAs Using X-Ray And Raman Techniques

Chu R. Wie; K. Xie; H. M. Kim; J. F. Chen; G. Burns; F. H. Dacol; G. D. Pettit; J. M. Woodall

doi:10.1117/12.947425

9 August 1988 Characterization of MeV iOn-Implanted GainAs/GaAs Using X-Ray And Raman Techniques

Chu R. Wie, K. Xie, H. M. Kim, J. F. Chen, G. Burns, F. H. Dacol, G. D. Pettit, J. M. Woodall

Proceedings Volume 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III; (1988) https://doi.org/10.1117/12.947425
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

Lattice relaxation, elastic strain, and phonon shifts are studied in as-grown, MeV ion-implanted, and thermally annealed strained GaInAs layers on GaAs(001) substrates. The degree of lattice relaxation for the as-grown samples is discussed in terms of the measured in-plane lattice constants and the calculated critical thickness. For the 15 MeV Cl or 9 MeV P ion bombarded GaInAs/GaAs, the beam-induced elastic strains and beam-induced phonon shifts are measured and discussed for samples with different degrees of initial relaxation. Thermal annealing on the as-grown and the ion-implanted GaInAs layers indicates a substantial thermal loss of indium in the thin surface layers and a full recovery of radiation damage in the GaInAs layers by 500°C.

Citation Download Citation

Chu R. Wie, K. Xie, H. M. Kim, J. F. Chen, G. Burns, F. H. Dacol, G. D. Pettit, and J. M. Woodall "Characterization of MeV iOn-Implanted GainAs/GaAs Using X-Ray And Raman Techniques", Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); https://doi.org/10.1117/12.947425

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available