Statistical modeling of SRAM yield performance and circuit variability

Qi Cheng; Yijian Chen

doi:10.1117/12.2085844

18 March 2015 Statistical modeling of SRAM yield performance and circuit variability

Qi Cheng, Yijian Chen

Proceedings Volume 9427, Design-Process-Technology Co-optimization for Manufacturability IX; 94270M (2015) https://doi.org/10.1117/12.2085844
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

In this paper, we develop statistical models to investigate SRAM yield performance and circuit variability in the presence of self-aligned multiple patterning (SAMP) process. It is assumed that SRAM fins are fabricated by a positivetone (spacer is line) self-aligned sextuple patterning (SASP) process which accommodates two types of spacers, while gates are fabricated by a more pitch-relaxed self-aligned quadruple patterning (SAQP) process which only allows one type of spacer. A number of possible inverter and SRAM structures are identified and the related circuit multi-modality is studied using the developed failure-probability and yield models. It is shown that SRAM circuit yield is significantly impacted by the multi-modality of fins’ spatial variations in a SRAM cell. The sensitivity of 6-transistor SRAM read/write failure probability to SASP process variations is calculated and the specific circuit type with the highest probability to fail in the reading/writing operation is identified. Our study suggests that the 6-transistor SRAM configuration may not be scalable to 7-nm half pitch and more robust SRAM circuit design needs to be researched.

Citation Download Citation

Qi Cheng and Yijian Chen "Statistical modeling of SRAM yield performance and circuit variability", Proc. SPIE 9427, Design-Process-Technology Co-optimization for Manufacturability IX, 94270M (18 March 2015); https://doi.org/10.1117/12.2085844

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available