Double high refractive-index contrast grating VCSEL

Marcin Gębski; Maciej Dems; Michał Wasiak; Robert P. Sarzała; J. A Lott; Tomasz Czyszanowski

doi:10.1117/12.2079328

4 March 2015 Double high refractive-index contrast grating VCSEL

Marcin Gębski, Maciej Dems, Michał Wasiak, Robert P. Sarzała, J. A Lott, Tomasz Czyszanowski

Proceedings Volume 9381, Vertical-Cavity Surface-Emitting Lasers XIX; 93810Q (2015) https://doi.org/10.1117/12.2079328
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Distributed Bragg reflectors (DBRs) are typically used as the highly reflecting mirrors of vertical-cavity surface-emitting lasers (VCSELs). In order to provide optical field confinement, oxide apertures are often incorporated in the process of the selective wet oxidation of high aluminum-content DBR layers. This technology has some potential drawbacks such as difficulty in controlling the uniformity of the oxide aperture diameters across a large-diameter (≥ 6 inch) production wafers, high DBR series resistance especially for small diameters below about 5 μm despite elaborate grading and doping schemes, free carrier absorption at longer emission wavelengths in the p-doped DBRs, reduced reliability for oxide apertures placed close to the quantum wells, and low thermal conductivity for transporting heat away from the active region. A prospective alternative mirror is a high refractive index contrast grating (HCG) monolithically integrated with the VCSEL cavity. Two HCG mirrors potentially offer a very compact and simplified VCSEL design although the problems of resistance, heat dissipation, and reliability are not completely solved. We present an analysis of a double HCG 980 nm GaAs-based ultra-thin VCSEL. We analyze the optical confinement of such a structure with a total optical thickness is ~1.0λ including the optical cavity and the two opposing and parallel HCG mirrors.

Citation Download Citation

Marcin Gębski, Maciej Dems, Michał Wasiak, Robert P. Sarzała, J. A Lott, and Tomasz Czyszanowski "Double high refractive-index contrast grating VCSEL", Proc. SPIE 9381, Vertical-Cavity Surface-Emitting Lasers XIX, 93810Q (4 March 2015); https://doi.org/10.1117/12.2079328

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available