|
ACCESS THE FULL ARTICLE
No SPIE Account? Create one
![Lens.org Logo](/images/Lens.org/lens-logo.png)
CITATIONS
Cited by 2 scholarly publications and 1 patent.
Mirrors
Microopto electromechanical systems
Microelectromechanical systems
Imaging systems
Fabry–Perot interferometry
Optics manufacturing
Sensors