Tuning mechanical resonant frequencies of nanoelectromechanical systems with light

Feng Tian; Guangya Zhou; Fook Siong Chau; Jie Deng

doi:10.1117/12.2081123

27 February 2015 Tuning mechanical resonant frequencies of nanoelectromechanical systems with light

Feng Tian, Guangya Zhou, Fook Siong Chau, Jie Deng

Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750I (2015) https://doi.org/10.1117/12.2081123
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

In this paper, mechanical resonant frequencies of a nanoelectromechanical systems (NEMS) device are tuned by light, in which optical spring effect plays a role. A NEMS spring mechanism with multi-degree of freedom (DOF) is adopted here. Double-coupled nanobeam photonic crystal cavities (PCCs) are utilized to pump the optical spring effect. One of the PCCs is fixed, while the other is driven by the NEMS mechanism. We investigate the shift of the mechanism’s firstorder in-plane translational (I1) resonance mode tuned by the incident laser wavelengths across the fourth-order even (TE_e,4) and odd (TE_o,4) modes of the coupled cavities. It shows a nonlinear relationship between the I1 mechanical frequency and the laser wavelength. We also investigate the frequency of the third-order torsional (T3) mode versus the wavelengths across the same cavity TE_e,4 mode and it shows a weaker torsional optical spring effect.

Citation Download Citation

Feng Tian, Guangya Zhou, Fook Siong Chau, and Jie Deng "Tuning mechanical resonant frequencies of nanoelectromechanical systems with light", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750I (27 February 2015); https://doi.org/10.1117/12.2081123

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