Quantum tunneling photoacoustic spectroscopy for the characterization of thin films

Benjamin S. Goldschmidt; Anna M. Rudy; Swarnasri Mandal; Charissa A. Nowak; John A. Viator; Heather K. Hunt

doi:10.1117/12.2080093

13 March 2015 Quantum tunneling photoacoustic spectroscopy for the characterization of thin films

Benjamin S. Goldschmidt, Anna M. Rudy, Swarnasri Mandal, Charissa A. Nowak, John A. Viator, Heather K. Hunt

Proceedings Volume 9369, Photonic Instrumentation Engineering II; 93690A (2015) https://doi.org/10.1117/12.2080093
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Thin films continue to show great promise for improving a wide variety of devices in applications such as medical instrumentation, material processing, and astronomical instrumentation. While ellipsometry and reflectometry are standard characterization techniques for determining thickness and refractive index, these techniques tend to require highly reflective or polished films and rely on empirical equations. We have created Quantum Tunneling Photoacoustic Spectroscopy (QTPAS) that uses light induced ultrasound to obtain thickness and refractive index estimates of transparent films. We present QTPAS to be used for the estimation of properties of single layer films as an alternative to ellipsometry and give qualitative sample measurements of the technique's estimated parameters.

Citation Download Citation

Benjamin S. Goldschmidt, Anna M. Rudy, Swarnasri Mandal, Charissa A. Nowak, John A. Viator, and Heather K. Hunt "Quantum tunneling photoacoustic spectroscopy for the characterization of thin films", Proc. SPIE 9369, Photonic Instrumentation Engineering II, 93690A (13 March 2015); https://doi.org/10.1117/12.2080093

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