Realization of sub-micron radius of curvature measurement in vertical interferometer workstation

Erlong Miao; Rudong Wang; Wei Zhang; Shijun Peng

doi:10.1117/12.2070796

18 September 2014 Realization of sub-micron radius of curvature measurement in vertical interferometer workstation

Erlong Miao, Rudong Wang, Wei Zhang, Shijun Peng

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 92820M (2014) https://doi.org/10.1117/12.2070796
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Radius of curvature (ROC) is one of the key parameters for optical elements and it is especially important for high quality optical system, in which the computer-aided integration is wildly used. ROC is one of the main input parameters and its measurement accuracy is a premise for high quality integration. In this paper, sub-micron ROC measurements are realized in a vertical interference workstation based on Fizeau interferometer. The error sources and uncertainty of the system are analyzed. Experiment results based on samples with difference ROC are presented and in accordance with the analysis. At last, a ROC comparing tests between the system and a three-coordinates measuring machine (CMM) are performed on a SiC ball to certify the workstation’s measurement uncertainty.

Citation Download Citation

Erlong Miao, Rudong Wang, Wei Zhang, and Shijun Peng "Realization of sub-micron radius of curvature measurement in vertical interferometer workstation", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 92820M (18 September 2014); https://doi.org/10.1117/12.2070796

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