Monolithic CMOS-MEMS integration for high-g accelerometers

Vinayak Narasimhan; Holden Li; Chuan Seng Tan

doi:10.1117/12.2070667

31 October 2014 Monolithic CMOS-MEMS integration for high-g accelerometers

Vinayak Narasimhan, Holden Li, Chuan Seng Tan

Proceedings Volume 9254, Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III; 925410 (2014) https://doi.org/10.1117/12.2070667
Event: SPIE Security + Defence, 2014, Amsterdam, Netherlands

Abstract

This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC’s SiGe MEMS platform, the MEMS offers a dynamic range of 5,000 g and a bandwidth of 12 kHz. The low noise readout circuit adopts a chopper-stabilization technique implementing the CMOS through the TSMC 0.18 µm process. The device structure employs a fully differential split comb-drive set up with two sets of stators and a rotor all driven separately. Dummy structures acting as protective over-range stops were designed to protect the active components when under impacts well above the designed dynamic range.

Citation Download Citation

Vinayak Narasimhan, Holden Li, and Chuan Seng Tan "Monolithic CMOS-MEMS integration for high-g accelerometers", Proc. SPIE 9254, Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III, 925410 (31 October 2014); https://doi.org/10.1117/12.2070667

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