Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration

D. Shu; J. Qian; W. Liu; S. Kearney; J. Anton; J. Sullivan; L. Assoufid

doi:10.1117/12.2062216

5 September 2014 Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration

D. Shu, J. Qian, W. Liu, S. Kearney, J. Anton, J. Sullivan, L. Assoufid

Author Affiliations +

Proceedings Volume 9206, Advances in Metrology for X-Ray and EUV Optics V; 92060H (2014) https://doi.org/10.1117/12.2062216
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Autocollimator-based long trace profiler requires precise angular calibration to perform accurate measurements for xray mirrors. A prototype of a precision two-dimensional tip-tilting stage system has been designed and tested for a new autocollimator-based long trace profiler at the Advanced Photon Source (APS), Argonne National Laboratory (ANL). This flexural stage system is designed to meet challenging mechanical and optical specifications for producing high positioning resolution and stability for angular calibration for autocollimator-based long trace profiler. It could also be used as a precision mirror manipulator for hard x-ray nano-focusing with Montel mirror optics. The mechanical design of a precision two-dimensional tip-tilting stage system as well as preliminary test results of its precision positioning performance are presented in this paper.

Citation Download Citation

D. Shu, J. Qian, W. Liu, S. Kearney, J. Anton, J. Sullivan, and L. Assoufid "Design of a precision two-dimensional tip-tilting stage system for autocollimator-based long trace profiler angular calibration", Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 92060H (5 September 2014); https://doi.org/10.1117/12.2062216

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