The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS

Ian Lacey; Nikolay A. Artemiev; Edward E. Domning; Wayne R. McKinney; Gregory Y. Morrison; Simon A. Morton; Brian V. Smith; Valeriy V. Yashchuk

doi:10.1117/12.2061969

17 September 2014 The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS

Ian Lacey, Nikolay A. Artemiev, Edward E. Domning, Wayne R. McKinney, Gregory Y. Morrison, Simon A. Morton, Brian V. Smith, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 9206, Advances in Metrology for X-Ray and EUV Optics V; 920603 (2014) https://doi.org/10.1117/12.2061969
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

The autocollimator and moveable pentaprism based DLTP [NIM A 616 (2010) 212-223], a low-budget, NOM-like profiler at the Advanced Light Source (ALS), has been upgraded to provide fast, highly accurate surface slope metrology for long, side-facing, x-ray optics. This instrument arrangement decreases sensitivity to environmental conditions and removes the gravity effect on mirror shape. We provide design details of an affordable base tool, including clean-room environmental arrangements in the new ALS X-ray Optics Laboratory with advanced temperature stabilization and turbulence reduction, that yield measurements in under 8 hours with accuracy better than 30 nanoradians (rms) for super polished,190 mm flat optics, limited mainly by residual temporal instability of the experimental set-up. The upgraded DLTP has been calibrated for highly curved x-ray optics, allowing same day measurements of a 15 m ROC sphere with accuracy of better than 100 nanoradians (rms). The developed calibration procedure is discussed in detail. We propose this specific 15 m ROC sphere for use as a round-robin calibration test optic.

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Ian Lacey, Nikolay A. Artemiev, Edward E. Domning, Wayne R. McKinney, Gregory Y. Morrison, Simon A. Morton, Brian V. Smith, and Valeriy V. Yashchuk "The developmental long trace profiler (DLTP) optimized for metrology of side-facing optics at the ALS", Proc. SPIE 9206, Advances in Metrology for X-Ray and EUV Optics V, 920603 (17 September 2014); https://doi.org/10.1117/12.2061969

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