Paper
18 July 2014 Design of an E-ELT M1 segment measurement machine with nanometer accuracy
A. Bos, R. Henselmans, P. C. J. N. Rosielle, M. Steinbuch, M. J. A. te Voert
Author Affiliations +
Abstract
The baseline design of the European Extremely Large Telescope features a telescope with a 39-meter-class primary mirror (M1), consisting of 798 hexagonal segments. A measurement machine design is presented based on a non-contact single-point scanning technique, capable of measuring the form error of each segment with nanometer uncertainty, fast, and with low operational costs. The implementation of a tactile precision probe eliminates the need for the CMM in the earlier segment manufacturing process. Preliminary assessment show nanometer-level uncertainty after calibration.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Bos, R. Henselmans, P. C. J. N. Rosielle, M. Steinbuch, and M. J. A. te Voert "Design of an E-ELT M1 segment measurement machine with nanometer accuracy", Proc. SPIE 9151, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, 91510X (18 July 2014); https://doi.org/10.1117/12.2055143
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KEYWORDS
Metrology

Mirrors

Interferometers

Calibration

Zerodur

Interferometry

Optical testing

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