Inductive sensors based on embedded coil technology for nanometric inter-segment position sensing of the E-ELT

Martin Wasmeier; Josef Hackl; Samuel Leveque

doi:10.1117/12.2054579

22 July 2014 Inductive sensors based on embedded coil technology for nanometric inter-segment position sensing of the E-ELT

Martin Wasmeier, Josef Hackl, Samuel Leveque

Author Affiliations +

Proceedings Volume 9145, Ground-based and Airborne Telescopes V; 91451R (2014) https://doi.org/10.1117/12.2054579
Event: SPIE Astronomical Telescopes + Instrumentation, 2014, Montréal, Quebec, Canada

Abstract

The primary mirror of the E-ELT consists of a mosaic of 798 hexagonal mirror segments whose relative positions will be measured by 4524 so-called edge sensors. The main properties of these three axes edge sensors are nanometric precision, high linearity, low sensitivity to temperature and humidity fluctuations as well as high reliability. This paper presents the outcome of a development carried out by Micro-Epsilon in the framework of prototype activities launched by the European Southern Observatory several years ago. The performance of inductive sensors based on Embedded Coil Technology are presented as well as results obtained on representative operational conditions.

Citation Download Citation

Martin Wasmeier, Josef Hackl, and Samuel Leveque "Inductive sensors based on embedded coil technology for nanometric inter-segment position sensing of the E-ELT", Proc. SPIE 9145, Ground-based and Airborne Telescopes V, 91451R (22 July 2014); https://doi.org/10.1117/12.2054579

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